| 发明名称 | Planarization device and planarization method using the same | ||
| 摘要 | A planarization device and a planarization method using the same are provided. The planarization device comprises a platen, a grinding pad, an operation arm, a chuck and a shielding pad. The grinding pad is disposed on the platen. The operation arm has a lower surface. The chuck rotatably is disposed on the operation arm. The shielding pad is detachably disposed on the lower surface of the operation arm. | ||
| 申请公布号 | US9434045(B2) | 申请公布日期 | 2016.09.06 |
| 申请号 | US201414269370 | 申请日期 | 2014.05.05 |
| 申请人 | MACRONIX INTERNATIONAL CO., LTD. | 发明人 | Yeh Yu-Hua;Hu Liang-Yu;Chang Tang-Tsai;Lai Ming-Tsan |
| 分类号 | B24B37/04;B24B37/34;B24B55/00;B24B37/10 | 主分类号 | B24B37/04 |
| 代理机构 | McClure, Qualey & Rodack, LLP | 代理人 | McClure, Qualey & Rodack, LLP |
| 主权项 | 1. A planarization device, comprising: a platen; a grinding pad disposed on the platen; an operation arm having a lower surface; a chuck rotatably disposed on the operation arm; and a first shielding pad detachably disposed on the lower surface of the operation arm; wherein a thickness of the first shielding pad is larger than a gap between the operation arm and the chuck, and wherein the first shielding pad extends below an upper surface of the chuck. | ||
| 地址 | Hsinchu TW | ||