COMPENSATION METHOD OF ACCELERATION SENSITIVITY OF MEMS GYROSCOPE

摘要

The present invention relates to a method of compensating sensitivity of acceleration generated in a gyroscope of a microelectromechanical system (MEMS) inertia sensor in a high-accelerated environment, comprising: a step of installing an inertial sensor on a rate table; a step of detecting an output of an axis of a gyroscope receiving acceleration by applying a constant angular velocity to the inertial sensor of the gyroscope in accordance with a rotation of the rate table; a step of calculating an error of acceleration sensitivity of the gyroscope by applying the detected output of the gyroscope to an error model; and a step of compensating by inputting the calculated error of acceleration sensitivity to the gyroscope.