| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to determine the parameters of a lens system and optical system which facilitate actual manufacture by making an overall evaluation function obtd. by adding an evaluation function in the state of containing errors to the evaluation function of an errorless state relating to the plural parameters and determining the variable to minimize the same. SOLUTION: A state S0 is an ideal state (errorless state) in which an impartation error is not given and the evaluation function is determined as E0 . The state that the error +δis added to the parameter Pi in addition thereto is S1 (error state) and the evaluation function is determined as E1 . A state S2 is the state added with the error of -δto the same parameter Pi and the evaluation function is determined as E2 . If the parameter Pi is handled as the variable, the parameter Pi in the three states is Pi , Pi±δand varies. The other parameters are commonly changed. The values of all the variables are determined and a wave front aberration or beam aberration, etc., are determined. The value of the overall evaluation function =ΣWKEK is calculated and the set of such variables as to minimize E is determined.
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