发明名称 |
Method to make a wider trailing pole structure by self-aligned pole trim process |
摘要 |
A method for forming a trimmed upper pole piece for a magnetic write head, said pole piece having a tapered profile that is widest at its trailing edge. Such a pole piece is capable of writing narrow tracks with sharply and well defined patterns and minimal overwriting of adjacent tracks. The present method produces the necessary taper by using NiCr, NiFeCr, Rh or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant. As a result, the write gap does not protrude to mask the effects of the ion-beam etch used to form the taper.
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申请公布号 |
US2004184190(A1) |
申请公布日期 |
2004.09.23 |
申请号 |
US20030394098 |
申请日期 |
2003.03.21 |
申请人 |
HEADWAY TECHNOLOGIES, INC. |
发明人 |
HAN CHERNG-CHYI;CHEN MAO-MIN;WANG PO KANG;LIU FENGLIN |
分类号 |
G11B5/31;G11B5/39;(IPC1-7):G11B5/147 |
主分类号 |
G11B5/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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