| 摘要 |
PROBLEM TO BE SOLVED: To inexpensively freeze and fix a workpiece on a substrate with a fixing agent interposed therebetween without using a wax. SOLUTION: Polyvinylalcohol is interposed between the workpiece 98 and the substrate 97 as the fixing agent 112, so as to freeze the fixing agent 112 to freeze and fix the workpiece 98 and the substrate 97. The substrate 97 fixed with the workpiece 98 is fixed on a chuck table 5, so that the workpiece is processed by a processing tool. COPYRIGHT: (C)2007,JPO&INPIT
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