| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent the degradation of a graphite member by changing the shape of corner part of a graphite member. <P>SOLUTION: The graphite member is for composing an apparatus for pulling a semiconductor single crystal and its corner part is rounded to have a specified curvature (or radius of curvature). For example, the corner parts of both sides of upper edges 7a of a graphite heater 7 are rounded. When the width of the graphite heater 7 is t, the radius of curvature r is preferable to be in a range from t/8 to t/4. By this processing, exfoliation/damage of the edges of a graphite heater 7 is prevented and degradation of a graphite material is prevented. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
