| 摘要 |
PROBLEM TO BE SOLVED: To provide a photoluminescence measuring device capable of measuring the intensity distribution of the photoluminescence light from the whole measuring object in a short time by radiating a laser beam. SOLUTION: This device has a laser light source 1 and a CCD camera 8. A polarizing filter 6 and a bandpass filter 7 for transmitting only the measurement wavelength by blocking the wavelength of the laser beam are arranged on an optical path between the measuring object 5 and the CCD camera. A condenser lens 2, a first galvano mirror 3, and a second galvano mirror 4 are arranged on an optical path between the laser light source and the measuring object. The laser beam condensed with the condenser lens is reflected by the first galvano mirror and the second galvano mirror, and scanned two-dimensionally. COPYRIGHT: (C)2008,JPO&INPIT
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