| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic pressure sensor capable of accurately measuring the pressure. SOLUTION: Conductive members 12 are embedded in the through holes in the recessed region of a glass substrate 11. On the conductive members 12, a wiring pattern 13 is formed and a GMR (giant magneto resistive) element 14 is formed. On the rear principal surface of the glass substrate 11, a seed layers 15 are formed so as to connect with the exposed conductive members 12. On the seed layers 15, an electrode pads 16 are formed. On the front principal surface of the glass substrate 11, a silicon substrate 18 is connected to a hard magnetic layer 19 in an opposite direction to the GMR element 14. The silicon substrate 18 is provided with a diaphragm 18a, in the region of which a hard magnetic layer 19 is formed. This hard magnetic layer 19 is embedded so as to be flush with the silicon substrate 18. COPYRIGHT: (C)2008,JPO&INPIT
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