| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that conventional technology for suppressing temperature vibration due to a refrigerating cycle cannot take advantage of a minimum value for a temperature under the temperature vibration. SOLUTION: On a first cooling stage 6 at the lower end of a cold bed 2, a condenser 14 is arranged in connection therewith, which consists of a refrigerant condensing part 11 formed of a heat conductor, a cylinder 2 formed of a heat insulating material, and a refrigerant evaporating part 13 formed of a heat conductor. Into an air sealing chamber 14 in the condenser 15, pressure refrigerant is filled whose boiling point falls in the amplitude range of the temperature vibration of the first cooling stage 6 due to the cold head 2. At a low temperature under the temperature vibration of the first cooling stage 6, the refrigerant is liquefied by the refrigerant condensing part 11 and falls down to the refrigerant evaporating part 13 to cool a second cooling stage 7. At a high temperature under the refrigerating cycle, the refrigerant is not liquefied and the first cooling stage 6 is thermally separated from the second cooling stage 7. COPYRIGHT: (C)2008,JPO&INPIT
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