| 摘要 |
PROBLEM TO BE SOLVED: To provide a porous static pressure gas bearing which has strong bearing rigidity and large load capacity and which can suppress the generation of self-exciting vibration. SOLUTION: The porous static pressure gas bearing 20 is equipped with a stainless steel made back metal 25 integrally provided with a discoid back metal body 21, a circular annular upright wall portion 23 erected on the outer peripheral edge of an annular surface 22 on one side of the back metal body 21, an annular projection 24 concentric with the circular annular upright wall portion 23 and erected on one surface 22 of the back metal body 21 so as to be surrounded by the circular annular upright wall portion 23. A circular recess 27 surrounded by the annular inner wall surface 26 of the annular upright wall portion 23 is divided into an annular outside recess 29 surrounded by the annular inner wall surface 26 of the annular upright wall portion 23 and an annular outer wall surface 28 of the annular projection 24 and a circular inside recess 31 surrounded by an annular inner wall surface 30 of the annular projection 24 to include the annular outside recess 29 and circular inside recess 31. COPYRIGHT: (C)2008,JPO&INPIT
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