LIGHTHOUSE SCANNER WITH A ROTATING MIRROR AND A CIRCULAR RING TARGET

摘要

The present invention introduces a scanning arrangement and a method suitable for coating processes applying laser ablation. The arrangement is suited to prolonged, industrial processes. The arrangement comprises a target (15), which has an annular form. The laser beam direction (12) is controlled by a rotating mirror (13) locating along the center axis of the annular target (15). The scanning line will rotate circularly along the inner target surface when the mirror (13) rotates. The focal point of the laser beams (12) may be arranged to locate on the inner target surface to ensure a constant spot size. A ring-formed, a cylinder-shaped or a cut conical-shaped target (15) may be used. The inner surface of the target may thus be tapered in order to control the release direction of the ablated material (16) towards a substrate (17) to be coated.