| 摘要 |
PROBLEM TO BE SOLVED: To provide a pellicle frame capable of inhibiting deformation of pellicle even with stretching a pellicle film and further inhibiting deformation and breakage of the pellicle frame at a corner part, and a manufacturing method the pellicle frame.SOLUTION: A pellicle frame is formed with a frame shape and consists of a sintered body with Young modulus of 150 GPa or more and Vickers hardness of 800 or more, corner parts 51 to 54 in the frame shape secure width L2 which is larger than the width of a linear part L1 and at least one width L2 of the corner parts is wider than the width of the linear part L1.SELECTED DRAWING: Figure 5 |
