ARRANGEMENT FOR CORRECTING ABERRATIONS IN A MICROSCOPE

摘要

The invention relates to an arrangement for correcting aberrations of a specimen surface that vary across the visual field on a microscope, including a lens, a tubular lens, an imaging optics element, a pupil stop disposed in the beam path, and at least one optical element for optical-geometric separation of different image field regions. The optical element for optical-geometric separation of different image field regions is arranged in or near the intermediate image plane. Each individual element of the optical element for optical-geometric separation of different image field regions performs a pupil imaging, defined by the dimensions of the covered area of the intermediate image, such that a distribution of sub-pupils occurs, wherein each sub-pupil is allocated to the angle distribution from the associated image field region.

主权项

1. A system for correcting aberrations of a specimen surface that vary across the visual field on a microscope, the system comprising a lens, a tubular lens, an imaging optics element, a pupil stop disposed in a beam path, and at least one optical element for optical-geometric separation of different image field regions, wherein the optical element for optical-geometric separation of different image field regions is arranged in or near an intermediate image plane and each individual element of the optical element for optical-geometric separation of different image field regions performs a pupil imaging, defined by the dimensions of the covered area of the intermediate image, such that a distribution of sub-pupils occurs, wherein each sub-pupil is allocated to an angle distribution from the associated image field region.