| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an alignment mark, or the like, ensuring a sufficient contrast when the position of a reticle is detected. <P>SOLUTION: An alignment mark 14 is made by depositing such a substance (chromium oxide (CrO)) as ensuring a contrast sufficient for detecting a mark when a silicon substrate is irradiated with a probe light on a reticle substrate 10 made of silicon (Si). <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
