VERFAHREN ZUR HERSTELLUNG VON OXIDSCHICHTEN MIT UNTERSCHIEDLICHER DICKE AUF EINER SUBSTRATOBERFLÄCHE,申请号DE20026018750-传众专利搜索

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发明名称	VERFAHREN ZUR HERSTELLUNG VON OXIDSCHICHTEN MIT UNTERSCHIEDLICHER DICKE AUF EINER SUBSTRATOBERFLÄCHE
摘要
申请公布号	DE60218750(D1)	申请公布日期	2007.04.19
申请号	DE20026018750	申请日期	2002.12.20
申请人	ADVANCED MICRO DEVICES INC.	发明人	WIECZOREK, KARSTEN;GRAETSCH, FALK;KRUEGEL, STEPHAN
分类号	H01L21/311;H01L21/28;H01L21/314;H01L21/318;H01L21/8234;H01L21/8238;H01L27/088;H01L27/092;H01L29/51	主分类号	H01L21/311
代理机构		代理人
主权项
地址

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