| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe pin having high reliability, a probe card, an inspection device and a control method of the inspection device. SOLUTION: The probe pin 7 is a probe pin of a probe card used for inspecting of a semiconductor device and has a base section 25, and a contacting terminal part 26. The contacting terminal part 26 is connected to the base section 25, and includes a terminal 19 in contact with an electrode of the semiconductor device which is an object to be inspected. In the contacting terminal part 26, a guide section 8 is formed at a position different from the terminal. COPYRIGHT: (C)2007,JPO&INPIT
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