| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultra-precision working device not transmitting vibration by a member becoming a vibration source to a working machine body while utilizing an existing facility possessed by the ultra-precision working device. SOLUTION: The ultra-precision working device is provided with the working machine body 11; a cover 12 surrounding the working machine body; and an auxiliary member provided in the cover. The working machine body is supported on a support frame 16 through a vibration-proof device 17, the cover is mounted on the support frame, and the member becoming the vibration source in the auxiliary member is mounted on the cover. The member becoming the vibration source comprises cutting agent feeding nozzles 35, 36 for feeding the cutting agent to a working portion of the working machine body or a dust-absorption duct 37 for recovering a chip generated at the working portion of the working machine body. COPYRIGHT: (C)2008,JPO&INPIT
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