PARTIAL PRESSURE DETECTION METHOD OF SPECIFIC GAS AND QUADRUPOLE MASS ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide a partial pressure detection method of a specific gas capable of correcting the partial pressure measured under a high-pressure atmosphere to a good value without using a total pressure measuring means. SOLUTION: The partial pressure of the specific gas in a gas to be measured is detected by measuring the ion current value corresponding to the mass charge ratio of the specific gas using a quadrupole mass analyzer 10. The measured value of a first ion current value corresponding to the mass charge ratio of the specific gas is corrected using the measured value of a second ion current value corresponding to the mass change ratio wherein the peak of an ion current value does not appears to calculate the actual partial pressure of the specific gas. COPYRIGHT: (C)2008,JPO&INPIT