MEASUREMENT DEVICE, LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a measurement device advantageous in terms of throughput.SOLUTION: A measurement device for measuring the position of an object has a detector for detecting a mark formed on the object and generating a detection signal, and a processing unit for obtaining the position of the object based on the detection signal. The processing unit obtains the position of the object based on a part of the detection signal limited based on the information about the allowable conditions on the measurement accuracy for the object.SELECTED DRAWING: Figure 1