HARD COATING FILM AND METHOD FOR PRODUCING SAME

摘要

A hard film whose composition formula satisfies M1-a-bCaNb, in which M is at least one element selected from Ti, Cr and Al, or is the element and at least one element selected from Group 4 elements except for Ti, Group 5 elements, Group 6 elements except for Cr, Si, Y, and rare earth elements. Atomic ratios of M, C and N satisfy: 0.01≦a≦0.50; 0.10≦b≦0.50; and 0<1-a-b. A ratio y of C-to-C bonding to all C bonding in the film is 0.20 or more.

主权项

1. A hard film whose composition formula satisfies M1-a-bCaNb, wherein the M is
(i) at least one element selected from the group consisting of Ti, Cr and Al, or (ii) at least one element selected from the group consisting of Ti, Cr and Al, in combination with at least one element selected from the group consisting of a Group 4 element except for Ti, a Group 5 element, a Group 6 element except for Cr, Si, Y and a rare earth element, wherein atomic ratios of M, C and N satisfy 0.01≦a≦0.50, 0.10≦a≦0.50 and 0<1-a-b, and a ratio y of C to C bonding to all C bonding in the film is 0.20 or more.