| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer cassette which reduces the likelihood of the damage of wafers due to an impact applied during transportation.SOLUTION: A wafer casette (4, 4a) is used for housing multiple annular frames (F1), each of which is attached to a wafer (W1) or an adhesive tape and is integrated with the wafer. The wafer casette (4, 4a) includes: multiple housing shelves (42) formed on facing side plates (41a, 41b) and housing the wafer or the annular frame; an opening (O1) through which the wafer or the annular frame is carried in or out; a back support part (41c) supporting the wafer or the annular frame by back parts (E1, E1a, E1b); a restriction part (44) restricting the wafer or the annular frame housed in the housing shelf from being carried out; and elastic parts (43, 43a, 43b) disposed in the back support part. The wafer or the annular frame housed in the housing shelf is held by the restriction part and the elastic members. |
