PROCESSING DEVICE FOR THIN-FILM SOLAR BATTERY, AND PROCESSING METHOD FOR THIN-FILM SOLAR BATTERY

摘要

PROBLEM TO BE SOLVED: To provide a processing device for a thin-film solar battery and a processing method for a thin-film solar battery that contribute to shorten a time required for forming scribe lines.SOLUTION: A processing device for a thin-film solar battery comprises: a stage for placing a substrate 10 on which an intermediate layer 23 is formed; a sharp tool for forming scribe lines 30 on the intermediate layer 23; a head for pressing the sharp tool against the intermediate layer 23; scanning means for scanning the sharp tool by moving the head relatively to the stage so that a plurality of first scribe lines 31 parallel to each other are formed on the intermediate layer 23; and a control device that controls operations of the head and the scanning means. The control device performs scanning from a processing termination point 31Y of one first scribe line 31 to an other processing start point 31X of the other first scribe line 31 while pressing the sharp tool, and thereby, forms second scribe lines 32 connecting between the processing termination points 31Y and the processing start points 31X.SELECTED DRAWING: Figure 4