| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type three-dimensional sensor excellent in productivity without using a silicone-based spacer, and a manufacturing method thereof.SOLUTION: A capacitance type three-dimensional sensor 1 includes: a sheet-like first electrode body (electrode body for Z-directional position detection) having a pattern-like conductive film; a second electrode body (electrode body for XY-directional position detection) having a pattern-like conductive film; and an easily deformable body 30 arranged between the first electrode body and the second electrode body. The easily deformable body 30 comprises polyurethane having Shore A hardness of 95 or less in measurement for a thickness of 1 cm, and includes a spacer formation sheet 31 having a sheet-like base part 31a and a plurality of dot-like spacers 31 formed on one surface of the base part 31a.SELECTED DRAWING: Figure 1 |
