发明名称 TEST METHOD FOR SEMICONDUCTOR PRODUCT DIE, AND ASSEMBLY INCLUDING TEST DIE FOR TEST
摘要 PROBLEM TO BE SOLVED: To provide design and test methodology for breaking a linear relation between a defect detecting range or test possibility and a design test or a cost related to production. SOLUTION: The present invention relates to a test assembly for testing a product circuit of a product die, and a product and a test die are prepared on a semiconductor wafer. The product circuit and a test circuit are divided into individual dies to eliminate or minimize the embedded test circuit on the product die 616. This provides a tendency of reducing a size of the product die, of reducing a production cost for the product die, and of maintaining a high-level test range for the product circuit in the product die. Then, the large number of product dies on one or more of wafer(s) can be tested using a test die 618. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005049336(A) 申请公布日期 2005.02.24
申请号 JP20040178019 申请日期 2004.06.16
申请人 FORMFACTOR INC 发明人 ELDRIDGE BENJAMIN N;KHANDROS IGOR Y;PEDERSEN DAVID V;WHITTEN RALPH G
分类号 G01R1/06;G01R1/073;G01R31/28;G01R31/3183;H01L21/66;H01L21/822;H01L23/544;H01L27/04;(IPC1-7):G01R31/28 主分类号 G01R1/06
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