发明名称 |
Reflective loop system producing incoherent radiation |
摘要 |
A system and method are used to form incoherent beams from a coherent beam. A system comprises a source of radiation and a reflective loop system. The source of radiation produces a coherent or partially coherent beam. The reflective loop system receives the partially coherent beam and reflects the partially coherent beam through a loop, or alternatively through non-overlapping loops, to form an incoherent beam.
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申请公布号 |
EP1865362(A1) |
申请公布日期 |
2007.12.12 |
申请号 |
EP20070252132 |
申请日期 |
2007.05.24 |
申请人 |
ASML NETHERLANDS BV;DAINIPPON SCREEN MFG., CO., LTD. |
发明人 |
BASELMANS, JOHANNES JACOBUS MATHEUS;UEYAMA, KENJI |
分类号 |
G02B27/48;G03F7/20 |
主分类号 |
G02B27/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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