发明名称 Reflective loop system producing incoherent radiation
摘要 A system and method are used to form incoherent beams from a coherent beam. A system comprises a source of radiation and a reflective loop system. The source of radiation produces a coherent or partially coherent beam. The reflective loop system receives the partially coherent beam and reflects the partially coherent beam through a loop, or alternatively through non-overlapping loops, to form an incoherent beam.
申请公布号 EP1865362(A1) 申请公布日期 2007.12.12
申请号 EP20070252132 申请日期 2007.05.24
申请人 ASML NETHERLANDS BV;DAINIPPON SCREEN MFG., CO., LTD. 发明人 BASELMANS, JOHANNES JACOBUS MATHEUS;UEYAMA, KENJI
分类号 G02B27/48;G03F7/20 主分类号 G02B27/48
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