| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-denseness and high-rigidity silicon carbide sintered compact and to provide its production method. <P>SOLUTION: The high-denseness silicon carbide ceramic is one containing 2-20 mass% oxynitride containing aluminum, silicon, and rare earth elements, wherein the ratio of the aluminum to the rare earth elements in the oxynitride is in the range of 95:5-30:70 by mass, the silicon carbide ceramic has a density of 3.0 g/cm<SP>3</SP>or higher, a Young's modulus of 380 GPa or higher, and desirably, the silicon carbide ceramic has a density of 3.20 g/cm<SP>3</SP>or higher and a Young's modulus of 420 GPa or higher. <P>COPYRIGHT: (C)2008,JPO&INPIT |
