发明名称
摘要 A crystallization method includes forming a black matrix layer that absorbs external light on an insulating substrate, wherein an upper region of the black matrix layer comprises a catalyst for silicon crystallization, patterning the black matrix layer, forming an amorphous silicon thin film on the insulating substrate and the black matrix layer, and thermally processing the amorphous silicon thin film for crystallization. A thin film transistor formed using the crystallization method has improved properties as a continuous metal-induced crystallization region and a metal-induced lateral crystallization region are formed therein without a definite boundary.
申请公布号 JP4204909(B2) 申请公布日期 2009.01.07
申请号 JP20030184563 申请日期 2003.06.27
申请人 发明人
分类号 G02F1/136;H01L21/20;C30B1/02;G02F1/1362;G02F1/1368;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L27/32;H01L29/786 主分类号 G02F1/136
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