发明名称 BASE FILM FOR DICING, AND DICING FILM
摘要 PROBLEM TO BE SOLVED: To provide a dicing film which hardly causes chipping when cutting a semiconductor wafer into chips in a dicing process of the semiconductor wafer. SOLUTION: A base film for dicing contains at least one layer of an (A) layer which contains a resin composition wherein 5-100 pts.wt. of a hydrogen-added styrene-butadiene copolymer, a polypropylene-based resin, or a mixture of these is mixed into 100 pts.wt. of a hydrogen-added styrene-isoprene copolymer. The dicing film including the base film for dicing is also provided. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009004568(A) 申请公布日期 2009.01.08
申请号 JP20070164024 申请日期 2007.06.21
申请人 GUNZE LTD 发明人 SAGO SHIGERU;OKAGAWA MASAAKI
分类号 H01L21/301;B32B25/08;B32B27/00;B32B27/30;C09J7/02 主分类号 H01L21/301
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