发明名称 |
BASE FILM FOR DICING, AND DICING FILM |
摘要 |
PROBLEM TO BE SOLVED: To provide a dicing film which hardly causes chipping when cutting a semiconductor wafer into chips in a dicing process of the semiconductor wafer. SOLUTION: A base film for dicing contains at least one layer of an (A) layer which contains a resin composition wherein 5-100 pts.wt. of a hydrogen-added styrene-butadiene copolymer, a polypropylene-based resin, or a mixture of these is mixed into 100 pts.wt. of a hydrogen-added styrene-isoprene copolymer. The dicing film including the base film for dicing is also provided. COPYRIGHT: (C)2009,JPO&INPIT
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申请公布号 |
JP2009004568(A) |
申请公布日期 |
2009.01.08 |
申请号 |
JP20070164024 |
申请日期 |
2007.06.21 |
申请人 |
GUNZE LTD |
发明人 |
SAGO SHIGERU;OKAGAWA MASAAKI |
分类号 |
H01L21/301;B32B25/08;B32B27/00;B32B27/30;C09J7/02 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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地址 |
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