| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly-accurate and user-friendly processing system, a processing method, and a program.SOLUTION: A control unit 50 of a heat treatment device, comprises: a recipe storage unit 52 which stores processing conditions; a learning history file storage unit 53 which stores learning history files; a model storage unit 51 which stores processing change models; a processing information receiving unit which receives information related to processing results; processing condition identifying means for identifying the processing conditions; processing result determining means for determining whether the processing results are in an allowable range; use determining means for determining whether to use the learning history file storing the same processing conditions according to whether device conditions changed after the learning history file has been created; learning history file determining means for determining the identified learning history file from the stored learning history files; processing condition calculating means for calculating processing conditions close to target processing results on the basis of the identified processing conditions, the determined learning history file, and the processing change models; and processing condition update means for updating the calculated processing conditions to the identified processing conditions.SELECTED DRAWING: Figure 3 |
