System, method and apparatus for forming a thin film lithium ion battery

摘要

A system and method of forming a thin film battery includes a substrate, a first current collector formed on the substrate, a cathode layer formed on a portion of the first current collector, a solid layer of electrolyte material formed on the cathode layer, a silicon-metal thin film anode layer formed on the solid layer of electrolyte material and a second current collector electrically coupled to the silicon-metal thin film anode layer. A method and a system for forming the thin film battery are also disclosed.

主权项

1. A battery comprising:
a substrate; a first current collector formed on the substrate; a cathode layer formed on a portion of the first current collector; a layer of solid electrolyte material formed on the cathode layer; a thin film anode layer formed on the layer of solid electrolyte material, wherein the thin film anode layer includes a plurality of adjacent pairs of alternating layers of material, wherein each pair of alternating layers includes a first layer and a second layer, wherein the first layer consists of silicon, and wherein the second layer includes a non-silicon material and wherein the non-silicon material is different in two or more of the second layers; and a second current collector electrically coupled to the thin film anode layer.