ELECTRET POWER GENERATION COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide a component capable of improving a power generation amount as an electret power generation component constituting an electrostatic induction type generator using an electret.SOLUTION: An electret power generation component 4 includes: a substrate 40; an electrode 41 formed on the substrate 40; and a thin film 42 made of an electret material formed on the electrode 41. Surface roughness of the thin film 42 is 0.005 μm or more and 50 μm or less in arithmetic average roughness (Ra) at a reference length 240 μm.SELECTED DRAWING: Figure 4