| 摘要 |
PROBLEM TO BE SOLVED: To prevent discontinuous characteristics from appearing in output characteristics of an A/D converter even if a variation in a gradient shape is generated in a density of wiring or characteristics of a transistor within a semiconductor wafer face in a semiconductor manufacturing process.SOLUTION: The A/D converter comprises: a plurality of fundamental A/D converters (A/D[00] to A/D[15]) that are disposed in an array shape; a control part (20) that causes the plurality of fundamental A/D converters to perform interleave operations; and an output part (30) by which output signals that are A/D converted by the fundamental A/D converters are combined and outputted. The fundamental A/D converters of which the interleave operations are performed sequentially, are disposed adjacently to each other in a lateral direction or a longitudinal direction.SELECTED DRAWING: Figure 1 |
