| 摘要 |
<p>A cross pole aperture is provided to increase an incident angle in a diagonal direction and improve a process margin by forming a center sigma of each of side parts longer than a center sigma of the center part. A cross pole aperture includes a non-opening part(110) and a plurality of opening parts(120). The opening parts are formed at four sides near to an outer circumference of the non-opening part. The opening parts are perpendicular to each other. Each of the openings includes two side parts(122) and a center part(121). A center sigma of each of the side parts is longer than a center sigma of the center part.</p> |
