发明名称 SOLID STATE IMAGING DEVICE, METHOD OF FABRICATING SOLID STATE IMAGING DEVICE, AND ELECTRONIC INSTRUMENT
摘要 PROBLEM TO BE SOLVED: To provide a solid state imaging device having further improved characteristics such as reduced optical color mixing, and an electronic instrument using the solid state imaging device.SOLUTION: A solid state imaging device comprises a substrate 12 and a plurality of photoelectric conversion units 40 formed in the substrate 12. Element isolation sections 19 having insulating films 21 buried therein are formed. The element isolation sections 19 comprise insulating films 20 that have a fixed electrical charge and that are formed so as to cover the surface of the inner walls of groove sections 39 formed in the depth direction from the light incidence side of the substrate 12.
申请公布号 JP2013175494(A) 申请公布日期 2013.09.05
申请号 JP20120029431 申请日期 2012.02.14
申请人 SONY CORP 发明人 YANAGIDA TSUYOSHI;OSHIYAMA ITARU;ENOMOTO TAKAYUKI;IKEDA HARUMI;IZAWA SHINICHIRO;YAMAMOTO ATSUHIKO;OTA KAZUNOBU
分类号 H01L27/146;H01L27/14;H01L31/10 主分类号 H01L27/146
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