发明名称 Substrate Storage Container And Positioning Method Of The Same
摘要 To provide a substrate storage container which, even when the substrate storage container is mounted on a machine with the container body's door element side inclined downward, can be suitably positioned without causing any hindrance to later operation, as well as providing a positioning method of the same, a container body 1 for accommodating a multiple number of precision substrates in alignment, a door element for opening and closing the open front of container body 1 and a multiple number of positioning parts 40 arranged on the bottom of container body 1 are provided. Each positioning part 40 is formed as a concave portion with a pair of parallel ribs 2 formed on the bottom surface of container body 1 and inner surfaces 9 of curved portions 8 of a track 6 formed in a bottom plate 4. Inner surfaces 9 of track 6 are formed to be inclined linearly becoming gradually wider downwards from their top while the upper ends of inner surfaces 9 are extended to an opposing area 2 a located between the lower ends of paired parallel ribs 2.
申请公布号 US2007215516(A1) 申请公布日期 2007.09.20
申请号 US20060578696 申请日期 2006.10.17
申请人 SHIN-ETSU POLYER CO., LTD. 发明人 SUMI ATSUSHI
分类号 B65D85/00;B65D85/86;H01L21/673;H01L21/68 主分类号 B65D85/00
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