MAGNETORESISTIVE ELEMENT MANUFACTURING METHOD, AND MULTI-CHAMBER APPARATUS FOR MANUFACTURING THE MAGNETORESISTIVE ELEMENT

摘要

A method for manufacturing a magnetoresistive element comprises a first step of preparing a magnetoresistive element having a magnetic film and a substrate, a second step of etching a predetermined zone of the magnetic film by a reactive ion etching method, and a third step of exposing the magnetic film after the second step, to a plasma of an ion current density of 4 x 10^-7 A/cm² or less.