| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotary coating method capable of forming a point symmetric wet region in a planar shape without leaving an air accumulation and as a result, obtaining a coating film having uniform thickness on the whole surface of a substrate by subsequent high speed rotation, when a low viscosity coating liquid is supplied on the surface of the substrate. SOLUTION: The rotary coating method is carried out by dispersing the coating liquid 12 on the surface of the substrate by rotating the substrate W on the surface of which the coating liquid 12 is supplied and includes a step for forming a first wet region 101a by supplying the coating liquid 12 on the center position of the substrate and a step for forming a second wet region 101b being in contact with the first wet region 101a and surrounding the first wet region 101a by supplying the coating liquid 12 on the outside position of the outer peripheral edge of the first wet region 101a while slowly rotating the substrate W at a second speed of rotation N2. COPYRIGHT: (C)2008,JPO&INPIT
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