发明名称 PROBE FOR TESTING SEMICONDUCTOR DEVICES
摘要 A novel probe design is presented that increases a probe tolerance to stress fractures. Specifically, what is disclosed are three features increase stress tolerance. These features include a various union angle interface edge shapes, pivot cutouts and buffers.
申请公布号 KR20090121410(A) 申请公布日期 2009.11.25
申请号 KR20097023065 申请日期 2008.03.04
申请人 TOUCHDOWN TECHNOLOGIES, INC. 发明人 TEA NIM;KHOO MELVIN;HU TING;AN ZHIYONG
分类号 G01R1/067;G01R1/04;G01R31/26;H01L21/66 主分类号 G01R1/067
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