发明名称 ORIENTED SUBSTRATE FOR USE IN FORMATION OF EPITAXIAL FILM, AND METHOD FOR PRODUCING SAME
摘要 The present invention provides a textured substrate for forming an epitaxial film, including a textured metal layer on at least one surface of the layer, the textured metal layer including a copper layer having a cube texture, the textured metal layer having, on a surface of the layer, palladium added in an amount of 10 to 300 ng/mm2 per unit area, the hydrogen content of the surface of the textured metal layer being 700 to 2000 ppm. This textured substrate is produced through a step of adding 10 to 300 ng/mm2 per unit area of palladium by strike plating to a surface of the copper layer having a cube texture.
申请公布号 US2016163425(A1) 申请公布日期 2016.06.09
申请号 US201414907893 申请日期 2014.07.22
申请人 TANAKA KIKINZOKU KOGYO K.K. 发明人 KASHIMA Naoji;WATANABE Tomonori;NAGAYA Shigeo;SHIMA Kunihiro;KUBOTA Shuichi;SUGANUMA Ryosuke
分类号 H01B12/06;C30B29/02;C30B29/22;C30B19/12 主分类号 H01B12/06
代理机构 代理人
主权项 1. A textured substrate for forming an epitaxial film, comprising a textured metal layer on at least one surface of the layer, wherein the textured metal layer comprises a copper layer having a cube texture, the textured metal layer has, on a surface of the layer, palladium added in an amount of 10 to 300 ng/mm2 per unit area, and a hydrogen content of the surface of the textured metal layer is 700 to 2000 ppm.
地址 Tokyo JP