| 发明名称 |
SPRAY UNIT AND APPARATUS FOR CLEANING SUBSTRATE HAVING SPRAY UNIT |
| 摘要 |
A spray unit, including a body assembly including a solution supply port, the solution port to supply cleaning solution; a flow channel in the body assembly, the flow channel connected with the solution supply port, the cleaning solution to flow through the flow channel; and a spray slit connected to the flow channel, the spray slit to spray out the cleaning solution, the flow channel including at least two chambers to hold the cleaning solution and at least two internal slits connecting the chambers to each other. |
| 申请公布号 |
US2016207074(A1) |
申请公布日期 |
2016.07.21 |
| 申请号 |
US201514849724 |
申请日期 |
2015.09.10 |
| 申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
YUM Je-Yung |
| 分类号 |
B08B3/02;B05B1/04 |
主分类号 |
B08B3/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A spray unit, comprising:
a body assembly including a solution supply port, the solution port to supply cleaning solution; a flow channel in the body assembly, the flow channel connected with the solution supply port, the cleaning solution to flow through the flow channel; and a spray slit connected to the flow channel, the spray slit to spray out the cleaning solution, the flow channel including at least two chambers to hold the cleaning solution and at least two internal slits connecting the chambers to each other. |
| 地址 |
Yongin-si KR |
