MICROFLUIDIC DEVICES FOR THE GENERATION OF NANO-VAPOR BUBBLES AND THEIR METHODS OF MANUFACTURE AND USE

摘要

Microfluidic devices having superhydrophilic bi-porous interfaces are provided, along with their methods of formation. The device can include a substrate defining a microchannel formed between a pair of side walls and a bottom surface and a plurality of nanowires extending from each of the side walls and the bottom surface. For example, the nanowires can be silicon nanowires (e.g., pure silicon, silicon oxide, silicon carbide, etc., or mixtures thereof).

主权项

1. A method of forming a microfluidic device from a wafer, wherein the wafer defines a first surface opposite from a second surface, the method comprising:
depositing an oxide layer on the first surface; forming a microchannel in the first surface of the wafer, wherein the microchannel is defined between a pair of side walls and a bottom surface; depositing a layer of Ag+ nanoparticles on each side wall and the bottom surface; and forming a plurality of nanowires extending from each side wall and the bottom surface.