| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved constituent body and an improved type lithography device used for weight compensation.SOLUTION: There is described a constitution body 200 of a lithography device having a component 126 and weight compensation device 202 for compensating weight of the component 126 F. The weight compensation device 202 has a first magnetic device 204 designed to apply a first magnetic force Facting over weight Fof the component 126 and against weight Fof the component 126 to the component 126 and a second magnetic device 206 designed to apply a second magnetic force Facting in a direction of weight Fof the component 126 to the component 126. The first magnetic force Fcorresponds to the sum of the second magnetic force Fand weight Fand the second magnetic device 206 is designed to reduce the second magnetic force Fwith same absolute value at same time as the first magnetic force F.SELECTED DRAWING: Figure 7 |
