Small production device and production system using the same

摘要

A production system to facilitate the commonization of front chambers among a plurality of production devices that are different in the kind of a process to be performed for a processing substrate.;Control units are provided separately in a processing chamber and a front chamber of a small production device. When the processing-chamber control unit outputs a load request signal, the front-chamber control unit loads a processing substrate to the processing chamber, and outputs a load acknowledgment signal. When the load acknowledgment signal is input, the processing-chamber control unit performs a process for the processing substrate, and outputs an unload request signal after the completion of the process. When the unload request signal is input, the front-chamber control unit unloads the processing substrate, and outputs an unload acknowledgment signal. When the unload acknowledgment signal is input, the processing chamber starts the preparation of the next process.

主权项

1. A small production device comprising:
a processing chamber to perform an intended process for a processing substrate; a front chamber to perform loading and unloading of the processing substrate with the processing chamber, using a conveyance mechanism provided internally; a processing-chamber control unit provided in the processing chamber to control the process for the processing substrate in the processing chamber; and a front-chamber control unit provided in the front chamber to control the loading and unloading of the processing substrate between the processing chamber and the front chamber, wherein the processing-chamber control unit sends a load request signal when a preparation of the process is completed, the load request signal requesting, to the front-chamber control unit, the loading of the processing substrate from the front chamber to the processing chamber, starts the process when a load acknowledgment signal is received from the front-chamber control unit, the load acknowledgment signal indicating that the loading of the processing substrate is completed, sends an unload request signal when the process is completed, the unload request signal requesting, to the front-chamber control unit, the unloading of the processing substrate from the processing chamber to the front chamber, and starts the preparation of the process when an unload acknowledgment signal is received from the front-chamber control unit, the unload acknowledgment signal indicating that the unloading of the processing substrate is completed, and the front-chamber control unit starts a loading behavior for the processing substrate when the load request signal is received from the processing-chamber control unit, sends the load acknowledgment signal to the processing-chamber control unit when the loading behavior for the processing substrate is completed, starts an unloading behavior for the processing substrate when the unload request signal is received from the processing-chamber control unit, and sends the unload acknowledgment signal to the processing-chamber control unit when the processing substrate is unloaded from the processing chamber.