| 摘要 |
PROBLEM TO BE SOLVED: To generate simulation data with which it is possible to inspect electronic components accurately.SOLUTION: A data generation device according to the present invention includes a data generation unit which, when generating simulation data used in an inspection device for which measurement contents are changeable, sets one of the measurement contents as an appropriate measurement content suitable for the inspection of a component to be inspected, and executes a data generation process to generate simulation data that includes information indicating a simulation value Bs1 in the appropriate measurement content when the component to be inspected is in a good state and information indicating a simulation value Bs2 in the appropriate measurement content when the component to be inspected is in a bad state, the data generation unit setting a measurement content as the appropriate measurement content in the data generation process when a difference between the simulation values Bs1 and Bs2 satisfies a previously stipulated condition.SELECTED DRAWING: Figure 4 |
