| 摘要 |
PROBLEM TO BE SOLVED: To provide a control device and a control method with which it is possible to suppress the overshooting of the inclination angle of a reflector that occurs in a process of controlling the inclination angle of a reflector, such as a micromirror, with a Coulomb force.SOLUTION: A control device according to one embodiment of the present invention controls the inclination angle of a reflector supported by an elastic member, the control device comprising: a pair of electrodes arranged face to face across the reflector so that electrostatic capacitance is formed between the reflector and the electrodes; and a control unit for generating a Coulomb force between the reflector and one of the pair of electrodes by charging the electrostatic capacitance through one of the pair of electrodes, and controlling a voltage between the pair of electrodes so as to temporarily suppress the Coulomb force in a process of the reflector having its position changed upon receiving the action of the Coulomb force.SELECTED DRAWING: Figure 1 |
