发明名称 |
Solid Source Container With Inlet Plenum |
摘要 |
A vessel for conveying a precursor fluid from the vessel, comprising: an interior volume having an upper volume and a lower volume, wherein the two volumes are in communication and the lower volume contains precursor; a lid comprising a fluid inlet directing carrier gas into the vessel, a "T" fluid outlet, a sidewall having an upper lip wherein the upper lip contacts the lid; a separator interposed between the lid and the sidewall wherein the separator resides adjacent the upper lip and segments the interior volume into the upper volume and a lower volume; and an inlet plenum in communication with the fluid inlet having a plenum chamber opening towards the separator to direct the carrier gas through the separator and towards the precursor. A method for using the apparatus is also disclosed.
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申请公布号 |
US2008092816(A1) |
申请公布日期 |
2008.04.24 |
申请号 |
US20070867171 |
申请日期 |
2007.10.04 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
BIRTCHER CHARLES MICHAEL;STEIDL THOMAS ANDREW |
分类号 |
B05C11/10;B05B7/26;B05B17/04 |
主分类号 |
B05C11/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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