| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid control valve which carries out a stable seal even at the time of high-temperature fluid control. SOLUTION: The fluid control valve 1 comprises a resin-made valve main body 2 including an aperture 14 communicating with an input port 11 and an output port 12, a valve seat 15 provided on the inner wall of the aperture 14, a resin-made valve upper body 3 connected to the upper face of the resin-made valve main body 2, and a resin-made diaphragm valve body 4 interposed between the resin-made valve main body 2 and the resin-made valve upper body 3, wherein the resin-made valve main body 2 is formed with an annular groove 16 outside the aperture 14, the diaphragm valve body 4 includes a circumferential part 4c provided with a wall thickness in the outer periphery and a ring body 35 annularly formed of a material harder than the diaphragm valve body 4 is attached to the circumferential part 4c. COPYRIGHT: (C)2009,JPO&INPIT
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