发明名称 Method of cadmium molecular beam based anneals for manufacture of HgCdTe photodiode arrays
摘要 In the preferred embodiment of the present invention, narrow bandgap II-VI compound semiconductor HgxCd1-xTe (0.1@x@0.5) (HgCdTe) wafers are annealed under Cd supersaturated conditions by exposing the HgCdTe planar or mesa surfaces to a Cd molecular beam in a vacuum deposition system before, during, and/or after anneals performed during individual photodiode fabrication process steps or HgCdTe epitaxial growth steps for eliminating or neutralizing the bulk or interfacial defects.
申请公布号 US8541256(B2) 申请公布日期 2013.09.24
申请号 US201213421860 申请日期 2012.03.16
申请人 WAN CHANG-FENG 发明人 WAN CHANG-FENG
分类号 H01L31/18 主分类号 H01L31/18
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