| 摘要 |
PROBLEM TO BE SOLVED: To maintain the surface temperature at a constant target temperature with no temperature unevenness over the whole area of the heating region (contact surface area of a heated object), in a heating apparatus including a heating plate having a flat surface for heating the heated object, and a heating body for heating the surface.SOLUTION: A large number of vertically long rod-like bodies provided, at the end 51 thereof, with a resistive heating elements heating by energization, are used as a heating body 50. Recesses 37 are provided at a large number of points set on the back surface 34 of a heating plate 30 scatteredly, the end 51 of each heating body 50 is fitted in each recess 37, and a large number of heating bodies 50 are provided on the back surface 34 of the heating plate 30 so as to be able to perform heating, respectively. Since the heating point of each heating body 50 is an end (spot ) 51, temperature unevenness never occur in the longitudinal direction along the surface of the heating plate 30, the surface can be maintained at a constant temperature with no temperature unevenness, by temperature control of the large number of heating bodies 50.SELECTED DRAWING: Figure 1 |
