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发明名称
摘要
申请公布号	JP2810947(B2)	申请公布日期	1998.10.15
申请号	JP19900010277	申请日期	1990.01.19
申请人		发明人
分类号	H01L21/225;H01L21/265;(IPC1-7):H01L21/225	主分类号	H01L21/225
代理机构		代理人
主权项
地址

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